• Author / Uploaded
• CristianSanclemente

Citation preview

2013-02-24

CMOS Compatible Nanoscale Vacuum Tube

02/19/2013 Jin-Woo Jin Woo Han, Ph. D NASA Ames Research Center

Electronic Revolution from Transistors

SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

1

2013-02-24

Evolution of Electronics Vacuum Triode (1906) Junction Transistor (1948)

Abacus

Pentium (1995)

Mechanical Switch Vacuum Tube Transistor Integrated Circuit

Pascal calculator (1670) Roman Analog (1500)

Eniac (1946) 17,000 Tubes

Babbage engine (1830)

Tradic (1954) 800 Transistors

IBM (1983)

SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

Vacuum Tube Grid

Cathode

Anode Vacuum

Transistor Gate Source

Drain

Silicon

Drain/Anode e Current

Operation Mechanism of Triode Devices

ON OFF

Gate/Grid Voltage g

• Switch • Amplifier

SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

2

2013-02-24

Back to the Past for Better Future For low-standby power (~2007) By MEMS technology For high mobility channel (~2004) By ALD technology

Nano-Electro-Mechanical Switch

?

For low gate delay By MG technology (~1990’) Gate S

Relay 1849 - Babbage Engine - 8000relays/5tons - Short lifetime

Vacuum Tube 19th

Late Century - Expensive - Bulky - Fragile - Energy hungry

1st Transistor 1947 (William Shockely) - Ge material - Instable

1st IC

D

Now

1959 (Robert - Si substrate Noyce) - SiO2 dielectric - Si material - Poly-Si gate - SiO2 dielectric - Al gate

SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

Edison Effects (1883) Hot filament (Cathode)

Current

Thomas Edison (1847-1931)

Thermionic Emission Æ Heat-induced flow of electron from a surface of metal to a vacuum Metal Workfunction Æ Minimum energy required for the electron overcomes the biding potential SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

3

2013-02-24

Vacuum Diode, Fleming Oscillation Valve (1903)

John Ambrose Fleming (1849-1945)

Fleming Oscillation Valve Æ First application of the Edison Effect used as a rectifier and detector SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

Vacuum Triode, Audion (1906) Grid

Cathode

Anode

Lee de Forest (1873-1961)

Vacuum Triode Æ First device to provide power gain and radio transmitter. SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

4

2013-02-24

Transistor (1914)

John Bardeen, William Shockley, Walter Brattain AT&T Bell Lab Nobel Prize in 1956

SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

Integrated Circuit (1958)

J k Kilby Jack Kilb (1923-2005) (1923 2005) Texas Instrument Nobel Prize in 2000

SF Bay Area Nanotechnology Council February 19, 2013 Texas Instrument

5

2013-02-24

Evolution Scenario of Triode Devices Vacuum Tube

MOSFET

Nano Vacuum Tube

+ Cheap

+ High gain + High performance +P Premier i audio di

+ CMOS process

+ Integrated Circuit

+ Cheap !!

+ Reliable

+L Long lifetime lif ti

+ Low energy

- Bulky, Fragile

+ High power

+ Long lifetime

- Expensive

+ Variety applications

- Short Lifetime - Power consumption

- Low performance - Low breakdown

+ High performance + Variety applications + Premier audio Vacuum ambient